1996
DOI: 10.1116/1.580344
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β-hydride elimination processes on silicon

Abstract: A lowenergy electron diffraction data acquisition system for very low electron doses based upon a slow scan charge coupled device camera Rev.The adsorption and decomposition of ethylbromide on the Si͑100͒ and Si͑111͒ surfaces is investigated. Ethylbromide adsorbs molecularly on Si at surface temperatures below 110 K. Warming the ethylbromide-covered surface above 200 K results in the cleavage of the carbonbromine bond with the formation of surface ethyl groups and coadsorbed bromine atoms. Further heating of t… Show more

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Cited by 21 publications
(17 citation statements)
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“…This peak exhibits a significant upward shift relative to the lone pair peak in ammonia. Consistent also with a previous study of ethylbromide adsorbed on the Si(100) surface at 110 K, [10] we ascribe the peak at 8.3 eV to the ethyl group. Figure 4 shows the effect of addition of a second ethyl group, i.e.…”
Section: Resultssupporting
confidence: 86%
“…This peak exhibits a significant upward shift relative to the lone pair peak in ammonia. Consistent also with a previous study of ethylbromide adsorbed on the Si(100) surface at 110 K, [10] we ascribe the peak at 8.3 eV to the ethyl group. Figure 4 shows the effect of addition of a second ethyl group, i.e.…”
Section: Resultssupporting
confidence: 86%
“…β-Hydrogen elimination was found to be the major pathway for the surface ethyl group decomposition with a minor reaction following the R-hydrogen elimination pathway. [9][10][11][12]14,[16][17][18][19] Our own previous multiple internal reflection Fourier transform infrared spectroscopy (MIR FT-IR) studies of iodoethane adsorption and decomposition on a Si(100)-2 × 1 surface provided valuable spectroscopic benchmarks for the analysis of ethyl groups on semiconductors. 20,21 Here we show that spectroscopic characteristics of the ethyl entity can be used to analyze the binding environment of the ethyl group and to understand the nature of chemical interaction of nitroalkane molecules with surfaces.…”
Section: Introductionmentioning
confidence: 99%
“…Figure 1A, the peak desorption temperature, TP, shifts from 640 K to 540 K as a function of chloroethane exposure, which is in good agreement with previous reports. [19][20][21] For comparison, in a separate experiment, a clean, 340 K p-type Si(100) sample was also exposed to ethylene by backfilling and its m/z 27 electron-impact cracking fragment was selectively monitored during TPD experiments, as shown in Figure 1B. By comparing the two families of desorption traces ( Fig.…”
Section: Methodsmentioning
confidence: 99%