1999
DOI: 10.1063/1.124231
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β-SiC nanorods synthesized by hot filament chemical vapor deposition

Abstract: A one-step procedure has been developed to grow β-SiC nanorods from a solid carbon and silicon source on a Si substrate by hot filament chemical vapor deposition. This process is catalyzed by metallic particles which come from impurities in the solid source which is a plate made by pressing a mixture graphite and silicon powders at 150 °C. Hydrogen was introduced into the reaction chamber to react with the solid plate to produce hydrocarbon and hydrosilicon radicals which presumably reacted to form SiC nanorod… Show more

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Cited by 167 publications
(80 citation statements)
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“…[3] In the VLS process, once the catalytic metal±Si alloy induces the SiNW growth, it would continue to do so as long as the Si vapor source continues. We used the metal-catalyst VLS approach to produce b-SiC nano rods, [14,15] SiC nanowires, [16] and aligned SiC nanowires [17] via hot-filament chemical vapor deposition (HFCVD) or laser ablation. Figure 1 shows Si and SiC nanowires synthesized by us using the VLS approach.…”
Section: The Oag Growth Of Silicon Nanowires (Sinws)mentioning
confidence: 99%
“…[3] In the VLS process, once the catalytic metal±Si alloy induces the SiNW growth, it would continue to do so as long as the Si vapor source continues. We used the metal-catalyst VLS approach to produce b-SiC nano rods, [14,15] SiC nanowires, [16] and aligned SiC nanowires [17] via hot-filament chemical vapor deposition (HFCVD) or laser ablation. Figure 1 shows Si and SiC nanowires synthesized by us using the VLS approach.…”
Section: The Oag Growth Of Silicon Nanowires (Sinws)mentioning
confidence: 99%
“…SiC nanorods have also shown great potential as an important candidate material for field-electron emitting devices [12]. SiC nanorods have been synthesized by several techniques, such as using carbon nanotubes as the templates to react with SiO [13], carbothermal reduction of silica xerogels [14], controlling the reaction between silicon halides and CCl 4 [15], and utilizing a hotfilament chemical vapor deposition approach to grow SiC nanorods on Si substrate [16]. However, a simpler and more effective method still needs to be developed to prepare SiC nanorods in large quantity for further practical applications.…”
Section: Introductionmentioning
confidence: 99%
“…This was contrary to the inert atmosphere commonly used for the growth of CNTs or Si NWs by various methods. In [28], SiC NWs were produced by the VLS mechanism in a HFCVD system using solid sources of Si and C. The process was catalyzed by metallic particles from impurities in the solid source (solid plate). The atomic hydrogen etched the solid plate and produced gaseous hydrocarbon radicals (CH x ), hydrosilicon radicals (SiH x ), or organosilicon molecules.…”
Section: C-sic Nw Growth Based On Vapor-liquid-solid (Vls) Mechanismmentioning
confidence: 99%