μ-CE Chip Fabricated by Moving Mask Deep X-ray Lithography Technology

Tabata, Osamu; You, Hui; Shiraishi, Haruki; Nakanishi, Hiroyuki; Nishimoto, Takahiro; Yamamoto, Kazuo; Baba, Yoshinobu

doi:10.1007/978-94-017-2264-3_33

Cited by 4 publications

(3 citation statements)

References 5 publications

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“…A master m-CAE PMMA chip with inclined channel sidewalls was fabricated by M2DXL using a dedicated deep X-ray lithography apparatus at the synchrotron radiation source ''AURORA'' in Ritsumeikan University (Kyoto, Japan). 35 Briefly, an X-ray mask fixed on a precision X-Y stage was placed above a PMMA substrate. The stage has two piezoelectric actuators to scan the mask in the X-Y plane.…”

Section: Methodsmentioning

confidence: 99%

Replica multichannel polymer chips with a network of sacrificial channels sealed by adhesive printing method

et al. 2005

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Replica microchips for capillary array electrophoresis containing 10 separation channels (50 microm width, 50 microm depth and 100 microm pitch) and a network of sacrificial channels (100 microm width and 50 microm depth) were successfully fabricated on a poly(methyl methacrylate) (PMMA) substrate by injection molding. The strategy involved development of moving mask deep X-ray lithography to fabricate an array of channels with inclined channel sidewalls. A slight inclination of channel sidewalls, which can not be fabricated by conventional deep X-ray lithography, is highly required to ensure the release of replicated polymer chips from a mold. Moreover, the sealing of molded PMMA multichannel chips with a PMMA cover film was achieved by a novel bonding technique involving adhesive printing and a network of sacrificial channels. An adhesive printing process enables us to precisely control the thickness of an adhesive layer, and a network of sacrificial channels makes it possible to remove air bubbles and an excess adhesive, which are crucial to achieving perfect sealing of replica PMMA chips with well-defined channel and injection structures. A CCD camera equipped with an image intensifier was used to simultaneously monitor electrophoretic separations in ten micro-channels with laser-induced fluorescence detection. High-speed and high-throughput separations of a 100 bp DNA ladder and phi X174 Hae III DNA restriction fragments have been demonstrated using a 10-channel PMMA chip. The current work establishes the feasibility of mass production of PMMA multichannel chips at a cost-effective basis.

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Section: Methodsmentioning

confidence: 99%

Replica multichannel polymer chips with a network of sacrificial channels sealed by adhesive printing method

et al. 2005

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“…To address this issue, we developed a novel technique for large-volume fabrication of μ-CAE plastic chips for high-throughput genetic analysis. The strategy involved development of moving mask deep X-ray lithography (M2DXL) technology to fabricate a 10-channel PMMA master chip with a slight inclination of channel sidewalls. Then, the μ-CAE chips with a high-aspect ratio channel array of 50-μm width, 50-μm depth, and 100-μm lane-to-lane spacing were fabricated by injection molding without obvious imperfections.…”

mentioning

confidence: 99%

High-Performance Genetic Analysis on Microfabricated Capillary Array Electrophoresis Plastic Chips Fabricated by Injection Molding

et al. 2005

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We have developed a novel technique for mass production of microfabricated capillary array electrophoresis (mu-CAE) plastic chips for high-speed, high-throughput genetic analysis. The mu-CAE chips, containing 10 individual separation channels of 50-microm width, 50-microm depth, and a 100-microm lane-to-lane spacing at the detection region and a sacrificial channel network, were fabricated on a poly(methyl methacrylate) substrate by injection molding and then bonded manually using a pressure-sensitive sealing tape within several seconds at room temperature. The conditions for injection molding and bonding were carefully characterized to yield mu-CAE chips with well-defined channel and injection structures. A CCD camera equipped with an image intensifier was used to monitor simultaneously the separation in a 10-channel array with laser-induced fluorescence detection. High-performance electrophoretic separations of phiX174 HaeIII DNA restriction fragments and PCR products related to the human beta-globin gene and SP-B gene (the surfactant protein B) have been demonstrated on mu-CAE plastic chips using a methylcellulose sieving matrix in individual channels. The current work demonstrated greatly simplified the fabrication process as well as a detection scheme for mu-CAE chips and will bring the low-cost mass production and application of mu-CAE plastic chips for genetic analysis.

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“…For example, the micro-channel array with inclined wall and the micro-lens rotation stages: the substrate tilt stage and the substrate array with parabola shape are necessary in our micro rotation stage, which offers some novel functions. The capillary array electrophoresis @-CAE) chip for DNA rotation axis of the substrate tilt stage has been adjusted to analysis [6]. However, such complicated structures are too coincide with a tangent of the surface of the substrate.…”

Section: X-ravmentioning

confidence: 99%

Deep X-ray exposure system with multistage for 3D microfabrication

You¹,

Matsuzuka²,

Yamaji³

et al.

MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)

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This paper reported a new deep X-ray exposure system to realize the 3D microstructures with controllable curved and inclined wall. Based on a compact synchrotron light source, a dedicated X-ray beamline and the exposure device had been constructed. They could work in the exposure environments of vacuum or helium gas. The exposure device was mainly made up of 5 stages and had as many as 6 degree of freedoms, which enabled the system to own much more function than the normal one. Besides the scan in its plan, the substrate surface could also rotate round one of its normal and tangent respectively. Driven by a PZT stage, the X-ray mask could move freely in its plan against the substrate behind, which were used to control the wall inclination and flexure of the substrate structure. The system also had the off-line mask-substrate alignment function. Various 3D PMMA microstructures can be realized by the system, such as lens array, nozzles, tube connector, conical tubes, inclined channels, long circle channels, angle pipe with smooth joint, cone, gear rack, long column with curve cross-section etc., which are impossible for the normal X-ray lithography system. A series of deep X-ray lithography experiments have been completed and obtained some interesting 3D PMMA microstructures and the relationship between the etching depth and the dose energy of the exposure. It demonstrated the potentiality of the system, which will greatly enlarged the application fields of deep x-ray lithography and LIGA process

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μ-CE Chip Fabricated by Moving Mask Deep X-ray Lithography Technology

Cited by 4 publications

References 5 publications

Replica multichannel polymer chips with a network of sacrificial channels sealed by adhesive printing method

Replica multichannel polymer chips with a network of sacrificial channels sealed by adhesive printing method

High-Performance Genetic Analysis on Microfabricated Capillary Array Electrophoresis Plastic Chips Fabricated by Injection Molding

Deep X-ray exposure system with multistage for 3D microfabrication

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