Using the complex of methods for attestation of the structural state in combination with computer simulation and measurement of mechanical properties (hardness), the influence of the period Λ on the mixing process on the interlayer boundaries of multilayer coatings TiNх/ZrNх is studied. The formation of two phases (TiN and ZrN) with one type of crystal lattice (structural type NaCl) is identified in the layers of multiperiodic compositions TiNx/ZrNx with a period of Λ 20 ... 300 nm. At Λ 10 nm, the formation of a solid solution (Zr, Ti)N, as well as a small volume of the TiN phase is revealed on XRD spectras. The presence of TiN component is due to the larger initial value of the layer based on titanium nitride. To explain the results obtained, the results of computer simulation of damage at the atomic level during bombardment by ions accelerated in the Ub field are used. The critical thickness of mixing (about 7 nm) in the TiNx/ZrNx system is determined upon condition that Ub -110 V. It is established that a decrease in the period from 300 to 20 nm leads to increase in hardness. The highest hardness of 44.8 GPa corresponds to the superhard state. It is established that the critical thickness of radiation-stimulated defect formation has a significant effect on the stress-strain state and hardness of coatings with a small Λ ≈ 10 nm. In this case, relaxation of the stress-strain compression state occurs and the hardness decreases. However, the formation of a solid solution, while retaining part of the unreacted layer of titanium nitride at Λ = 10 nm, makes it possible to obtain an ultrahigh (44.8 GPa) hardness of the coating.