Атомная И Электронная Структура Пленок Siox, Полученных С Помощью Водородной Плазмы Электрон-Циклотронного Резонанса

Перевалов, Т. В.; Iskhakzai, R. M. Kh.; Алиев, В. Ш.; Гриценко, В.А.; Prosvirin, Igor P.

doi:10.31857/s004445102012007x

Zh. Eksp. Teor. Fiz.

2020

DOI: 10.31857/s004445102012007x

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Атомная И Электронная Структура Пленок Siox, Полученных С Помощью Водородной Плазмы Электрон-Циклотронного Резонанса

Т. В. Перевалов¹,

R. M. Kh. Iskhakzai²,

В. Ш. Алиев³

et al.

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Атомная И Электронная Структура Пленок Siox, Полученных С Помощью Водородной Плазмы Электрон-Циклотронного Резонанса

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