Электронная техника. Серия 3. Микроэлектроника
 2021
DOI: 10.7868/s2410993221040096
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ВЛИЯНИЕ КАТАЛИЗАТОРА ТЕРМООТВЕРЖДЕНИЯ В АНТИОТРАЖАЮЩЕМ ПОКРЫТИИ НА ПРОФИЛЬ ЭЛЕМЕНТОВ ФОТОРЕЗИСТА, "Электронная Техника. Серия 3. Микроэлектроника"

Н.А. Кузнецова1,
Н.В. Малимоненко2,
М.А. Билданов3
et al.

Abstract: Исследовано влияние концентрации в антиотражающем покрытии кислотного (п-толуолсульфокислота) и нейтрального (триэтиламмониевая соль додецилбензолсульфокислоты) катализаторов сшивки полимерного связующего на профиль элементов фоторезиста.

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