In this paper we investigated the crystallization of NiTi metallic glass foils of equiatomic composition by XRD and AFM. The initial foil surface which was obtained by the melt spinning method contained only cristalline phases of impurities. Ten-minute annealing at 500°C leads to phase transition in the form of devitrification of Ni50Ti50 phase. The analisys of foil surface geometry included calculation of direct inhomogeneities characteristics, roughness and fractal dimension, as well as the parameters of multifractal fromalism. It was showen that after ten-minute heat treatment at 500°C all above mentioned characteristics have local extrema. In particular there is a minimum of the widths of the singularities spectra which indicates the monofractalization of the system.