Влияние Температуры Синтеза На Микроструктуру И Электрофизические Свойства Пленок BST 80/20

Abstract

The paper shows the effect of synthesis temperature on the microstructure and electrophysical properties of ferroelectric films of composition Ba0.8Sr0.2TiO3 when formed on silicon substrates with a platinum sublayer. On the basis of electrophysical and topographical measurements, a conclusion is made about the effect of the temperature of synthesis of ferroelectric films on their properties.