2018
DOI: 10.21883/ftt.2018.06.45991.02m
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Высокоскоростной композитный микроактюатор на основе сплава Ti-=SUB=-2-=/SUB=-NiCu с эффектом памяти формы

Abstract: Samples of microactuators are made of a bimorph composite of Ti_2NiCu alloy with a thermoelastic martensitic transition and the shape memory effect, and their response rate is investigated. The active layer of the composite actuator is a layer of the rapidly quenched Ti_2NiCu alloy, pseudoplastically prestretched, and an amorphous layer of the same alloy is used as an elastic layer. Typical sizes of the microactuator are 30 × 2 × 2 μm. The controlled amplitude of the displacement of the microactuator tip is ap… Show more

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