Две стадии роста кластеров La-=SUB=-0.7-=/SUB=-Sr-=SUB=-0.3-=/SUB=-MnO-=SUB=-3-=/SUB=- в магнетронной плазме при модуляции потока частиц ионно-звуковой волной и осаждении его на стекло

Abstract

The films with amorphous structure obtained by magnetron sputtering of La0.7Sr0.3MnO3 target were investigated, which made it possible to study the kinetics of clusterization of magnetron plasma during the movement of a flow of interacting particles with the formation at first of local atomic configurations of the pre-cluster level (the first stage of clusterization) and subsequent deposition of the flow on an extended glass substrate (the second stage of the formation of multi-scale clusters). It is shown that the non-monotony in the change of atomic order and properties of the samples with distance from the target is related to the presence of heterovalent manganese ions in the flow and their spatial modulation by an ion-acoustic wave. It was found that the Mn3+ and Mn4+ ions are contained in the fragments of the planes (13ī)-R; (203)-R; (212)-O; (003)-O belonging to the different-scale clusters.