Изучение Критического Угла Каналирования Ионов Активных Металлов Через Тонкие Пленки Алюминия

Abstract

The spatial distributions of ions (K+, Na+) passed through thin polycrystalline and single-crystalline Al films with the thickness from 180 to 600 Å and critical channeling angles have been studied. The ion energies have been varied within the range E0 = 10-30 keV. It has been shown that an increase in the energy of the primary ion beam leads to a decrease in the width of the maxima of the angular distribution, which is associated with a decrease in the critical channeling angle ψcr. It has been found that the value ψcr does not exceed 4-50 for axial channeling and 9-100 for planar channeling.