Using computer simulation, the sputtering coefficients of Be and W targets, promising materials for the first wall and divertor in the ITER tokamak, are calculated in a wide range of incident atom energies 10–100 000 eV. The following atoms were chosen as projectiles: H, D, T, He, Be, C, N, O, Ne, Ar, W. A strong influence of the surface profile on the results obtained is shown. The limiting cases of a planar potential barrier (smooth surface) and a spherical potential barrier (rough surface) are considered. Data on the average energy and angular distributions of sputtered atoms were obtained, which are necessary for calculating the influx of impurities into the tokamak plasma. The influx of wall material atoms into the ITER tokamak plasma is estimated when the wall is sputtered by flows of fast deuterium and tritium atoms leaving the plasma.