Особенности Наноструктурирования Поверхности Кремния В Результате Ее Сверхбыстрого Нагрева Фемтосекундным Лазерным Импульсом В Воде

Abstract

Silicon surface morphology induced by a femtosecond laser pulse at near-threshold fluences in water environment is investigated by means of atomic-force microscopy (AFM). With increasing fluence, the silicon surface transforms into nanoscale ring-shaped and blister structures, as well as smooth and nanostructured microcraters with a minimum depth of 1 nm. The formation of starlike patterns imprinted at the surface of microcraters at fluences above the ablation threshold is observed.