Особенности Формирования Волнообразного Рельефа Поверхности Кремния При Облучении Фокусированным Пучком Ионов Галлия

Smirnova, Marina; Бачурин, В. И.; Мазалецкий, Л. А.; Пухов, Д. Э.; Churilov, A. B.; Rudyi, A. S.

doi:10.31857/s1028096022040161

Поверхность. Рентген., синхротрон. и нейтрон. исслед.

2022

DOI: 10.31857/s1028096022040161

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Особенности Формирования Волнообразного Рельефа Поверхности Кремния При Облучении Фокусированным Пучком Ионов Галлия

Marina Smirnova¹,

В. И. Бачурин²,

Л. А. Мазалецкий³

et al.

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Особенности Формирования Волнообразного Рельефа Поверхности Кремния При Облучении Фокусированным Пучком Ионов Галлия

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