Структурная характеризация короткопериодной сверхрешетки на основе гетероструктуры CdF-=SUB=-2-=/SUB=-/CaF-=SUB=-2-=/SUB=-/Si(111) методами просвечивающей электронной микроскопии и рентгеновской дифрактометрии

Abstract

A detailed study of the structure of a short-period superlattice based on alternating layers of cadmium and calcium fluorides, grown by molecular beam epitaxy on a Si (111) substrate, by transmission electron microscopy and X-ray diffractometry, has been carried out. It was found that the superlattice is in a pseudomorphic state, and a lateral inhomogeneity with a fragment size of 10 - 40 nm was found. The reason for the broadening of the main and satellite peaks of the SL on the (111) diffraction curve has been clarified.