Электронная техника. Серия 3. Микроэлектроника
 2021
DOI: 10.7868/s2410993221030039
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ТИПЫ МОДЕЛЕЙ ДЛЯ ОПИСАНИЯ НАПРАВЛЕННОЙ САМОСБОРКИ Блок-Сополимеров, "Электронная Техника. Серия 3. Микроэлектроника"

М.В. Литаврин1,
Е.С. Горнев2,
С.И. Янович3

Abstract: Рассматривается метод направленной самосборки (directed self-assembly, DSA) блок-сополимеров, общая схема маршрута формирования маски и требования к моделям направленной самосборки. Проводится обзор классов моделей для описания данного метода.

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