Эллипсометрическое Исследование Тонкопленочных Структур Аморфного Гидрогенизированного Углерода И Наночастиц Золота

Abstract

In this work, the optical constant films of amorphous hydrogenated carbon (a-C: H) and a hybrid structure based on it with a granulated gold film before and after their annealing at 300 °C were studied by spectral ellipsometry. The dispersions n (λ) and k (λ) of the a-C:H film were established using the Cauchy approximation and its thickness. The spectral features of the Au plasmon nanoparticle layer deposited on the a-C:H surface were modeled as an effective medium and a Lorentz oscillator. The parameters of the films and their thickness were determined by fitting the calculated spectra to the ellipsometric spectra  (λ) and  (λ). The obtained data were used to determine the parameters of the Lorentz oscillator in the model of a-C:H / Au two-layer structure. As a result of the a-C:H / Au structure annealing, the intensity of the maxima in the spectra n and k increased, their position shifted to the blue region, and the half-width of the bands decreased. The observed changes in the ellipsometric spectra are completely consistent with the spectrophotometric data of this structure.