三维表面形貌测量中的共聚焦显微成像技术研究进展

Wang Yueying, 王玥颖; Liu Xu, 刘旭; Hao Xiang, 郝翔

doi:10.3788/lop230533

激光与光电子学进展

2023

DOI: 10.3788/lop230533

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三维表面形貌测量中的共聚焦显微成像技术研究进展

王玥颖 Wang Yueying,

刘旭 Liu Xu,

郝翔 Hao Xiang

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2024

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光谱共焦显微技术研究进展

Ding Wanyun,

Wang Yuhang,

Zhang Tao

et al. 2024

激光与光电子学进展

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Chromatic confocal microscopy (CCM) combines the high spatial resolution of confocal microscope and the high wavelength resolution of spectral analysis. By virtue of the high precision, strong applicability, and nondestructive detection, it is widely used in the fields of industrial production, biomedicine, semiconductor chips, and other fields. This paper first introduces the principle of point chromatic confocal system and points out its drawback of low detection efficiency. Second, for improving the key performance indexes of chromatic confocal microscopy, the main achievements made in light source, dispersive objective lens, and spectral signal detection are described, and qualitative comparisons are made between various types of light sources. Subsequently, the scanning methods of chromatic confocal microscopy are demonstrated, the relevant research progress is sorted out, and the advantages and disadvantages of the relevant methods are summarized. Finally, the future developments of chromatic confocal microscopy are also prospected.

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光谱共焦显微技术研究进展

Ding Wanyun,

Wang Yuhang,

Zhang Tao

et al. 2024

激光与光电子学进展

View full text Add to dashboard Cite

show abstract

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

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三维表面形貌测量中的共聚焦显微成像技术研究进展

Cited by 1 publication

References 58 publications

光谱共焦显微技术研究进展

光谱共焦显微技术研究进展

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