光刻机自由照明用微反射镜阵列设计

Zhang Jingwei, 张敬巍; Hu Jingpei, 胡敬佩; Sun Mengjie, 孙梦婕; Hu Jiahao, 胡家豪; Zeng Aijun, 曾爱军; Huang Huijie, 黄惠杰

doi:10.3788/cjl240490

Chin. J. Laser

2024

DOI: 10.3788/cjl240490

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光刻机自由照明用微反射镜阵列设计

张敬巍 Zhang Jingwei,

胡敬佩 Hu Jingpei,

孙梦婕 Sun Mengjie

et al.

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光刻机自由照明用微反射镜阵列设计

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