厦漳泉城市群小时交通圈研究

Abstract

We have developed a very sensitive transmission line-type thin film sensor. The sensor, consisting of a coplanar line, SiO ２ film, and amorphous CoFeSiB film, was fabricated by sputtering, lift-off, and lithography processes. A phase change of 45 degrees/Oe was obtained at 1 GHz. We arranged two-dimensional stepping motors and developed a scanning system for the sensor. Aluminum samples with through holes were examined by using the eddy current method. Aluminum wires with small Fe balls as impurities were tested by measuring the DC field.