基于激光技术的硬脆材料SiC表面抛光的研究进展

Wang Zirui, 王子睿; Fan Cheng, 樊成; Huang Dongmei, 黄冬梅; Wang Yongguang, 王永光; Zhao Dong, 赵栋; Ni Zifeng, 倪自丰

doi:10.3788/lop240928

Laser Optoelectron. Prog.

2024

DOI: 10.3788/lop240928

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基于激光技术的硬脆材料SiC表面抛光的研究进展

王子睿 Wang Zirui,

樊成 Fan Cheng,

黄冬梅 Huang Dongmei

et al.

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基于激光技术的硬脆材料SiC表面抛光的研究进展

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References 61 publications

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