湿法刻蚀钝化对GaAs表面性能影响的工艺研究

Zhang Yalei, 张亚磊; Lan Yunping, 兰云萍; Han Jiayuan, 韩佳媛; Zhang Hongrong, 张洪榕; Zou Yonggang, 邹永刚

doi:10.3788/cjl231276

Chin. J. Laser

2024

DOI: 10.3788/cjl231276

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湿法刻蚀钝化对GaAs表面性能影响的工艺研究

张亚磊 Zhang Yalei,

兰云萍 Lan Yunping,

韩佳媛 Han Jiayuan

et al.

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湿法刻蚀钝化对GaAs表面性能影响的工艺研究

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