紫外光刻-湿法刻蚀硅中阶梯光栅的研制

Abstract

Objective The echelle grating, with a high spectral resolution and large angular dispersion, is the core component of highresolution spectrometers. The main preparation method of echelle grating is mechanical holographic lithography combined with ion beam etching and wet etching. The gratings by the traditional mechanical method have a high cost, a rough groove surface, and a Roland ghost. The holographic lithography combined with ion beam etching can hardly