We analyze theoretically several crucial performance aspects of terahertz quantum cascade lasers, such as the impact of doping on the threshold current, the relative importance of the various scattering mechanisms, and the balance of coherent transport and realistic energy dissipation. We have developed a fully self-consistent model for stationary charge transport based on nonequilibrium Green's function theory that takes into account incoherent scattering with phonons, impurities, and rough interfaces as well as electron-electron scattering in the Hartree approximation, but does not a priori assume the electron distributions to follow the periodicity of the quantum cascade laser ͑QCL͒ structure. The theoretical results show excellent quantitative agreement with experimental data. We find scattering at rough interfaces to strongly affect electronic transport and efficiently limit the optical gain. Our results also indicate that a large portion of the current is maintained by coherent multibarrier tunneling. We show that this dominant coherent transport may lead to electron distributions that do not follow the periodicity of the QCL.

The interaction between cavity modes and optical transitions leads to new coupled light-matter states in which the energy is periodically exchanged between the matter states and the optical mode. Here we present experimental evidence of optical strong coupling between modes of individual sub-wavelength metamaterial nanocavities and engineered optical transitions in semiconductor heterostructures. We show that this behaviour is generic by extending the results from the mid-infrared (~10 μm) to the near-infrared (~1.5 μm). Using mid-infrared structures, we demonstrate that the light-matter coupling occurs at the single resonator level and with extremely small interaction volumes. We calculate a mode volume of 4.9 × 10−4 (λ/n)3 from which we infer that only ~2,400 electrons per resonator participate in this energy exchange process.

Coherent superposition of light from subwavelength sources is an attractive prospect for the manipulation of the direction, shape and polarization of optical beams. This phenomenon constitutes the basis of phased arrays, commonly used at microwave and radio frequencies. Here we propose a new concept for phased-array sources at infrared frequencies based on metamaterial nanocavities coupled to a highly nonlinear semiconductor heterostructure. Optical pumping of the nanocavity induces a localized, phase-locked, nonlinear resonant polarization that acts as a source feed for a higher-order resonance of the nanocavity. Varying the nanocavity design enables the production of beams with arbitrary shape and polarization. As an example, we demonstrate two second harmonic phased-array sources that perform two optical functions at the second harmonic wavelength (∼5 μm): a beam splitter and a polarizing beam splitter. Proper design of the nanocavity and nonlinear heterostructure will enable such phased arrays to span most of the infrared spectrum.