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The requirement to fabricate CCD imagers free of defects brings about the need to identify the origin of the defects in an effort to improve the imager technology. The following defects in the video display were commonly observed: vertical and horizontal lines, localized spots, and striations. Their origin was analyzed using a combination of optical microscopy, chemical etching, and EBIC. It was establishd that they are related to defects present in the oxide and polysilicon, defects introduced into the bulk silicon by processing, and defects present in the starting material. A detailed discussion of their relation to the starting material, device processing steps, and their appearance in the displayed output as a function of the device operating conditions is given.

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