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A lithography machine designed for laser direct writing of metallisation in ASIC'S and MCM, and the associated practical process are described.To demonstrate the feasibility of the laser direct writing, the last level of metallisation on a bipolar ASIC has been drawn. The design rules have been calculated using a theoretical modelling of the interaction between laser beam and photoresists.Calculation and experiment are in good agreement for two kinds of photoresists.1.

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Abstract:In order to attract more high school students in the scientific and technical universities, we develop an " itinerary class room in laser technology". Based on laser hardware that fits within few small suitcases, a general and illustrated talk on laser basics is followed by various experiments by the students themselves OCIS codes: (000.2060 ; 000.2190 ; 000.5920) SummaryThe diminution of the number of students in our scientific programs in Universities has obviously various origins. The image of the technology and the scientist in his lab is somehow not appealing enough for the high school student. To counteract this trend, we conceived a set of animation able to bring inside high schools some of the leading technology in photonics: namely lasers and applications.