The article discusses the technological principles of improving the manufacturing process of consumable cathodes-targets of vacuum electric arc evaporation plants from complex silicides. Which are based on: the selection of chemical composition based on the analysis of state diagrams of double and triple systems, the production of fast-cooled ingots using high-speed induction melting, subsequent grinding and grinding to a powder of the required fraction, static or dynamic pressing of the cathode blank, its sintering and soldering of the current guide. The results of laboratory studies of the process are presented and prototypes of products are obtained.

OBTAINING A CATHODE TARGET OF SILICIDES FOR VACUUM ION-PLASMA SOURCES I. A. IVANOV, A. G. SLUTSKY, V. A. SHEINERT, E. V. KOVALEVICH, V. N. KHLEBTSEVICH, Belarusian National Technical University, Minsk, Belarus, 65, iivanou@bntu.by The coatings based on silicides of various metals are widely used in various industries by vacuum-plasma processes for products treatment. The quality of such coatings is determined by the degree of chemical purity of the target cathode, the correct choice of a mixture of process gases and the level of accelerating potential supplied to the substrate. Traditional methods for producing multi-component targets have a number of disadvantages, such as: high residual porosity, excess content of impurities, as well as the need for expensive equipment. The use of casting technologies in the production of target cathodes is promising. The paper presents the generalized results of experimental studies of manufacturing target cathodes for vacuum ion-plasma sources by methods of reduction and high-speed induction melting. Silicides of titanium, copper and nickel were used as the material. Keywords. Complex silicides, reduction and induction melting, cast cathodes-targets, macro-and microstructure.For citation . Ivanov I. A., Slutsky A. G., Sheinert V. A., Kovalevich E. V., Khlebtsevich V. N. Obtaining a cathode target of silicides for vacuum ion-plasma sources. Foundry production and metallurgy, 2018, vol. 91, no. 2, pp. 99-102. Вакуумная ионно-плазменная обработка изделий с формированием на их поверхности защитных слоев широко используется для придания поверхности из этих материалов специальных свойств . В про-изводстве широко применяются покрытия на основе силицидов титана, меди, никеля и других элемен-тов . Использование таких соединений обусловлено их специальными свойствами (высокие температуры плавления, твердость, жаропрочность, износо-и коррозионная стойкость) .Процесс вакуумного ионно-плазменного формирования покрытий на основе силицидов достаточно прост в реализации и хорошо изучен . Качество таких покрытий определяется степенью химической чи-