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The investigation of the mechanism of diamond abrasive finishing of monocrystalline silicon carbide on the basis of a generalized model of formation and removal of debris particles and material removal has demonstrated that the use of specific value of the energy of transfer as a criterion for the assess ment of machining efficiency permits substantiating suitability of boron carbide and titanium dioxide powders for fine grinding and of chromium oxide, alumina, ceric oxide, and ASM 2/1 diamond micron powders for ultrafine grinding.

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