No abstract

An investigation of the transient characteristics for a high power high-pressure argon arc stabilized by vortexing gas and water wall in LTE is presented. The 30 cm long arc is operated in a current range from 50 to 400 A and is short circuited for brief durations (typically 100 ps to 2 ms) such that the arc does not extinguish. Transient arc voltage, arc current, and radiant intensity at 900 nm resulting from this arc lamp notching are recorded. The arc is shorted using a crowbar circuit consisting of several high power IGBTs in parallel, chosen for their ruggedness and fast response times in the order of 500 ns. The arc is operated in such way that a quartz envelope is cooled on the inside by a spiraling film of deionized water. This effective cooling allows for electrical input power into the arc lamp of up to 300 kW. The experimental setup is described, with reference to electrical, water, and gas system design and results are interpreted with reference to expected arc behaviour. Experimental results are compared to a numerical model describing transient characteristics of a cylindrical argon high-pressure arc column. Resonance lines are assumed fully trapped in this model. All other arc radiation losses are assumed optically thin in this model. The numerical modeling approach is discussed and verified by comparison with experimental results. A close agreement between theoretical results and experimentally observed transient radiation characteristics and arc voltage is found. This indicates the radiation loss term in the model is represented with sufficient accuracy. This study is aimed at determining a maximum "arc-interruption-interval" that does not require re-ignition of the plasma. Such brief interruption of the radiative output allows for various in-situ diagnostics on samples during processing with the high-power Vortek arc lamp.A numerical model is presented to investigate the influences of cathode and nozzle geometries on the characteristics of transferred arc torches for waste melting process. The arc plasma is described in the atmospheric condition by a two dimensional magnetohydrodynamic (MHD) model with the assumptions of steady state, axisymmetry, local thermodynamic equilibrium (LTE) and optically thin plasma. In order to simulate the realistic torch configurations with complex nozzle and cathode arrangements, the unstructured triangular andlor quadru-lateral grid systems are used with a finite volume discretization, gradient reconstruction procedure and a SIMPLE-like pressure-correction algorithm[ 11. For the self-consistent prediction of temperature profiles on the anode workpiece and heat transfer rates to it, the energy conservation and current continuity equations are solved not only in the thermal plasma region but also in the anode region with the special treatment of electric conductivity and energy balance at the interface of plasma and anode material. By the suggested numerical model, the temperature and flow field distributions of argon plasmas and the heat flux rates to anode materi...

IThe dopant activation process used during manufacture of modem logic chip devices requires ever steeper heating and cooling ramp rates of the silicon wafer. Tungsten filament lamps tradtionally provided the heat source for this process. However, due to their inherent limitations, a new technology is required to deliver the thermal energv profile for future generations of semiconductor processing.The requirements for future Rapid Thermal Processing (RTP) of semiconductor wafers will be discussed from a standpoint of available radiation sources. Key characteristics of these radiation sources for wafer processing and their impact on the RTP process will be described.Based on these different approaches a candidate radiation source satisfying future RTP requirements has been developed. It is a 300 mm long flash lamp based on a Vortek water vortex stabilized high-pressure high-power arc lamp. This flash lamp is much more powerful than any other commercially available flash lamp. It has been specifically designed for said RTP application and typically operates with peak currents up to 50 kA and pulse widths in the order of 1 to 2 111s.The general operation of this flash lamp will be described. The capacitor bank and power supplies to operate the lamp will be d i s cussed. The influence of the pre-flash 100 A to 1000 A simmer current on flash performance will be shown. Challenges with respect t o electrode development and dynamic interaction of the plasma column with the water wall and quartz tube will be explained. As well, the process of identifying appropriate tube dimensions will be described. Results from shot-twshot reproducibility runs will be discussed.Finally, fundamental characteristics of this flash lamp will he presented including spectral, electrical, and thermal performance. A description of diagnostics and measurement techniques and irr strumentation used in gathering this information will also be prw vided. JAPANRecently, new type of headlamp for automobiles called HID (High Intensity Discharge) lamp is widely used. HID lamp has some advantages (low wattage, high efficacy, white color, and long life) compared with general halogen lamp,. The conventional HID lamp contains the metal-halides (ScI%NaI), mercury, and Xe gas (under lMpa at room temperature) in the lamp. Because of its containing the mercury, the demands of mercury-free HID lamp is getting stronger and stronger. However, the lamp life is extremely spoiled without mercury, because of its lower lamp voltage (about 25V). This study reports two technological innovations to achieve the new mercury-free HID lamp for automobiles with high lamp voltage. First is the new additive metal-halide, I d 3 (indium triiodide), To obtain the higher lamp voltage, some metal halides were selected which have higher vapor pressure. As a result of many experiments, we confirm that In13 is suitable for the lamp voltage. The lamp in which contains ScI5Nal-InI3 achieves higher lamp voltage than the S c I 5 N d lamp's. However, both high voltage and high ficacy cannot be...