This paper describes the design and implementation of a new class of fully integrated oscillators in standard MMIC technology. Each oscillator comprises of a rectangular waveguide cavity resonator, a loop amplifier, and a phase shifter. Several cavities are constructed on standards GaAs substrate with quality factors of 120-170 between 40-50 GHz. The phase noise of a 52 GHz MMIC oscillator is -122 dBc/Hz at 1MHz offset.
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