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We focus on the potential of Optical MEMS for large area applications and discuss why it is very beneficial to use micro system technologies, especially Optical MEMS, on large scale. We present micromirror applications for daylight guiding into buildings and for light concentration in solar technologies as well as the corresponding technological approaches.

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We present the design and the potential of actuable micromirror arrays for light guiding applications on large areas. These micromirror arrays are intended to be implemented into the windows of buildings and to provide functionalities like daylight guiding into rooms, heat regulation, and glare protection. Placed between two panes of a window, these mirrors are maintenance-free and not subject to defilement. The use of micro system technology on large areas requires very low cost processes and materials, a concept with a minimum of process steps, as well as very easy and reliable process control. We present our design approaches and the corresponding technological results.