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BST thin films have been grown by Chemical Solution Deposition (CSD) method on the substrate of Pt/Si. The fabrication of BST doped by Fe have been successfully using spin coater with 4000 rpm during 30 second. Annealing process use the holding time at 3 hours, the heating rate at 5°C/min and temperature at 800°C. The ratio of Ba0.8Sr0.2TiO3molar and Fe variant dopant (0%, 1%, 3%, and 5%) were characterized by X-Ray Diffraction (XRD) and obtaining results that show the peak shift due to variations dope. The peak shifted to the right for each increment Fe dopant. Results of addition Fe dopant also cause a differences in the magnitude of Full Width at Half Maximum <em>(</em>FWHM) and lattice parameters on BST ferroelectric materials. Other characterize that has been done by Scanning Electron Microsopy (SEM), it is show the thickness of the material. The resulting lattice parameters with the General Structure Analysis System (GSAS) software analysis showed that a thin films of BST and BSTF have a tetragonal structure because it has a value of a=b≠c and α=β=γ=900. Based on SEM characterization, the thickness of thin film is about 330 nm.