The microballoon actuators are used for the active flow control in turbulent boundary layer for aerodynamic control of flight vehicles. The packaging, interfacing, and integration of the microballoon actuators within the flight vehicle play a key role for functioning of the microballoon actuators during the flight conditions. This paper addresses the design and analysis of packaging and integration aspects and associated issues. The use of microballoon actuators on the control surfaces and nose cone of flight vehicles has the positive influence of delaying the flow separation from the aerodynamic surface. This results in enhancing aerodynamic effectiveness and lift as well as reduction of drag. A typical control surface is configured with eight microballoon actuators symmetric wrt the hinge line of the control surface and embedded within the control surface. Provision of the Pneumatic feed line system for inflation and deflation of the microballoons within the control surface has been made. The nose cone has been designed to have 32 such actuators at the circular periphery. The design is found to be completely feasible for the incorporation of microballoon actuators, both in the nose cone and in the control surface.

In the fabrication of complicated MEMS inertial sensors, there are many instances where metallisation cannot be done by usual methods such as lift off or conventional metal etch. In such cases, a shadow mask needs to be used. A silicon shadow mask can be realised by the fabrication of through holes in silicon. This also can be used as a cover wafer for wafer level encapsulation by fabricating a cavity in the device region. The fabrication of the shadow mask is carried out by doing double side wet anisotropic etching using potassium hydroxide (KOH) + hydroxylamine (NH 2 OH) solution at low temperatures of 50-60°C. The low temperature of etching is preferred so as to reduce the etching of thermal oxide used as a mask layer. This work focuses on the etching characteristics of the KOH + NH 2 OH solution at low temperatures in terms of etch rate, undercutting, surface morphology, and selectivity of an oxide layer with silicon. This is very useful in through hole etching using silicon dioxide as a mask. The effect of aging on these characteristics is also studied and this is useful in continuous etching spread over few days especially during pilot production. The results are compared with those obtained using a pure KOH solution.

The development of microelectromechanical systems (MEMS) technology and the suitability and compatibility of sizes of microactuators with the boundary layer thickness fueled the active flow separation control to gain the air flow momentum for the last few years. The present paper deals with the development of a robust, largedeflection, and large-force MEMS-based microballoon actuator for aerodynamic control of flight vehicles such as projectiles, micro air vehicles, aircrafts, etc. Experiments were carried out on the scaled-up models for different input pressure conditions to study the response of microballoon actuator. To evaluate the performance of the microballoon actuators, simulation studies on MEMS scale models were conducted in the CoventorWare environment. Simulation studies involving static and dynamic analyses have been carried-out on the microballoon actuator models. Various geometric and input parameters influencing the behaviour of the microballoon actuator were investigated. It has been observed that a maximum deflection of 1.2 mm to 1.5 mm can be achieved using microballoon actuators and the maximum operational frequency of 60 Hz to 80 Hz can be used for the operation of microballoon actuators. Also, the sizes of the microballoon actuators designed are compatible and suitable to be used in turbulent boundary layer of aerodynamic flight vehicles.