The existence of various spatial distributions of hydrogen plasma in a pulsed 2.45 GHz microwave discharge is demonstrated. The data has been obtained through optical emission diagnostics utilizing an ultra-fast CCD camera system with multi-channel plate (MCP) intensifiers, and a wavelength-filtered photodiode recording temporal light emission signals of hydrogen atoms and molecules. It has been observed that the magnetic field topology and strength are determining the transitions between different plasma patterns and spectral saturation times while neutral gas pressure and microwave power show a weaker influence on the profiles but affect the emitted light intensity.

A comparative study of two microwave driver systems (preliminary and optimized) for a 2.45 GHz hydrogen Electron Cyclotron Resonance plasma generator has been conducted. The influence on plasma behavior and parameters of stationary electric field distribution in vacuum, i.e., just before breakdown, along all the microwave excitation system is analyzed. 3D simulations of resonant stationary electric field distributions, 2D simulations of external magnetic field mapping, experimental measurements of incoming and reflected power, and electron temperature and density along the plasma chamber axis have been carried out. By using these tools, an optimized set of plasma chamber and microwave coupler has been designed paying special attention to the optimization of stationary electric field value in the center of the plasma chamber. This system shows a strong stability on plasma behavior allowing a wider range of operational parameters and even sustaining low density plasma formation without external magnetic field. In addition, the optimized system shows the capability to produce values of plasma density four times higher than the preliminary as a consequence of a deeper penetration of the magnetic resonance surface in relative high electric field zone by keeping plasma stability. The increment of the amount of resonance surface embedded in the plasma under high electric field is suggested as a key factor.

First results from an ultra-fast frame image acquisition diagnostic coupled to a 2.45 GHz microwave hydrogen discharge are presented. The plasma reactor has been modified to include a transparent doubled shielded quartz window allowing to viewing the full plasma volume. Pictures describing the breakdown process at 1 μs exposure time have been obtained for integrated visible light signal, Balmer-alpha, Balmer-beta lines, and Fulcher-band. Several different plasma emission distributions are reported. The distribution depends on the magnetic field configuration, incident microwave power, and neutral gas pressure.

An experimental study of temperature and density evolution during breakdown in off-resonance ECR hydrogen plasma is presented. Under square 2.45 GHz microwave excitation pulses with a frequency of 50 Hz and relative high microwave power, unexpected transient temperature peaks that reach 18 eV during 20 μs are reported at very beginning of plasma breakdown. Decays of such peaks reach final stable temperatures of 5 eV at flat top microwave excitation pulse. Evidence of interplay between incoming power and duty cycle giving different kind of plasma parameters evolutions engaged to microwave coupling times is observed. Under relative high power conditions where short microwave coupling times are recorded, high temperature peaks are measured. However, for lower incoming powers and longer coupling times, temperature evolves gradually to a higher final temperature without peaking. On the other hand, the early instant where temperature peaks are observed also suggest a possible connection with preglow processes during breakdown in ECRIS plasmas.

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