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The authors have started the development of a new scanning-free, wavelength-dispersive X-ray fluorescence spectrometer, which uses a silicon strip detector instead of a goniometer, a slit, flat analyzing crystal, and laboratory X-ray source. The X-rays dispersed by the slit and flat analyzing crystal are detected simultaneously by different silicon strip detector channels, and a high energy resolution is achieved by limiting the measurement range. In the spectrometer designed for Cr, Mn, and Fe in the range from 5.38 to 6.64 keV, an energy resolution of 3.9 eV for Fe Kα 1 was obtained, and it was observed that KMnO 4 (VII) is different from MnO (II) in the peak energy of Mn Kβ 1,3 . Furthermore, a Kβ' satellite peak on the low-energy side of Mn Kβ 1,3 was clearly observed, and the difference in behavior of Kβ' was investigated. Another similar investigation of Cr 2 O 3 (III) and K 2 CrO 4 (VI) was performed. These results indicate that the new wavelength-dispersive X-ray fluorescence spectrometer has a high energy resolution and is applicable to the chemical state analysis of 3d transition elements, which is obtained by analyzing the details of the Kβ peak at the scale of a few eV.

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