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Phone: þ7 928 771 66 57, Fax: þ7 863 297 51 20Copper-containing thin films were synthesized by a citrate sol-gel method using ethylene glycol. The evolution of the shape and local atomic structure of the copper-containing fractal crystallites at different stages of growth was investigated by the combination of experimental and theoretical techniques. A surface morphological study of the deposited film samples was carried out using SEM. It revealed the evolution of the crystallite structures as a function of annealing temperature. To describe this mechanism diffusion-limiting aggregation and cluster-cluster models were used. X-ray absorption spectroscopy (XANES) was applied to show the dynamics of the local atomic structure of Cu ion and the copper oxidation state at different stages of crystallites formation. It was found that at temperatures up to 250 8C the Cu 2 Cl(OH) 3 (atacamite phase) and chelate complex are formed. With temperature increases changes in the local atomic structure as well as in morphology take place and at 500 8C CuO formed. As a result of these processes, the fractal organization of the other level was observed.

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SiOxCuOythin films were prepared by the deposition on to the Si/SiO2substrates from the alcoholic solutions employing the sol-gel technique. The various analytic techniques were applied to characterize structure and properties of the films under study . The both X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) studies showed the presence CuO as well as CuO2phases and formation of a dual-oxide CuSiO3with the average crystallites sizes of 35-50 nm. The conductance of the films was rather sensitive to the presence of 1-20 ppm NO2concentration at the operating temperatures in the range of 20–200◦C.