We correlate structure analyzed by transmission electron microscopy with photo- and cathodoluminescence studies of GaN/Al2O3(0001) and GaN/SiC(0001) and show that an additional UV line at 364nm/3.4eV can be connected to the occurrence of stacking faults. We explain the occurrence of this line by a model that is based on the concept of excitons bound to stacking faults that form a quantum well of cubic material in the wurtzite lattice of the layer material. The model is in reasonable agreement with the experimental observations.

Epitaxial GaN films have been grown on GaN single-crystal substrates, using on surface cracked ammonia as nitrogen precursor for molecular beam epitaxy. With this approach excellent optical and structural properties are achieved. Low-temperature photoluminescence shows well-resolved excitonic lines with record low linewidths as narrow as 0.5 meV. The transitions are attributed to excitons bound to neutral donors ((D°, X)1 at 3.4709 eV and (D°, X)2 at 3.4718 eV) and to a neutral acceptor ((A°, X) at 3.4663 eV). In addition, free exciton lines are observed at 3.4785 eV, 3.4832 eV, and 3.499 eV for excitons A, B, and C, respectively.

With the use of ammonia as nitrogen precursor for Group III-Nitrides in an on surface cracking (OSC) approach, MBE becomes a serious competitor to MOVPE. Homoepitaxial GaN exhibits record linewidths of 0.5 meV in PL (4K), whereas GaN grown on c-plane sapphire also reveals reasonable material properties (PL linewidth ≈ 5 meV, n ≈ 1017 cm-3 , μ 220 cm2/Vs). Beside results on hetero- and homoepitaxial growth of GaN, insights into the growth mechanisms are presented. The growth of ternary nitrides is discussed, p- and n-doping as well as first LED results are reported.

Chemically assisted ion-beam etching (CAIBE) was used to remove subsurface damage from polished GaN bulk substrates prior to growth. Subsequently, GaN layers were deposited by metalorganic vapor phase epitaxy. Only the CAIBE-treated areas reveal a mirror-like surface without trenches, scratches, or holes. A dramatic increase of crystal quality is determined by low-temperature cathodoluminescence (CL). Compared to not CAIBE-treated material, the CL intensity is improved by a factor of 1000 and the linewidth is ten times narrower.

GaN epitaxial layers on GaN single crystals were grown using molecular beam epitaxy with an NH3 source. The deposited layers were examined by high resolution x-ray diffraction and photoluminescence (PL) spectroscopy. We observed strong and extremely narrow (half-widths of 0.5 meV) lines related to the bound excitons. In the higher energy range we observed three strong lines. Two of them are commonly attributed to free exciton transitions A (3.4785 eV) and B (3.483 eV). Their energetic positions are characteristic of strain-free GaN material.