The paper examines the corrosion behavior of amorphous TiB 2 films 70-250 nm in thickness and amorphous-crystalline films with crystals 15-90 nm in size in 3% NaCI solution. It is shown that the corrosion resistance and passivation anodic potential increase with thickness of TiB 2 amorphous films. It is also established that TiB 2 films are oxidized through pitting corrosion. The corrosion instability of amorphous films is mainly due to their interaction with impurity (in particular, oxygen and carbon) structural inhomogeneities and of amorphous-crystalline films due to the interaction with amorphous-crystalline boundaries. The corrosion resistance of amorphous TiB 2 films is approximately 4000 times higher than that of bulk powder material and 8 to 10 times higher than that of amorphous-crystalline films.Diborides of transition metals are radically new materials in thin-film technology. The unique combination of high conductivity, high heat resistance, exceptional chemical inertness, and low electron work function makes them unique candidates for use in heat-resistant high-conductivity layers, Schottky contacts with n-Si and n-GaAs, and diffusion barriers in multilayer contacts with semiconductors [1, 2]. The corrosion properties of ceramic films of titanium nitride and boride have recently been of increasing interest. This is because these compounds are promising thin-film protective coatings [3,4].However, there are no publications on the research of the corrosion resistance of thin nanostructured TiB 2 films in liquid corrosive media.The objective of this paper is to study the corrosion behavior of nanostructured TiB 2 films in 3% NaCl solution. To ascertain the mechanism of the process, the microstructure of the films after corrosion tests was examined.The corrosion tests were conducted using the electrochemical method of plotting potentiodynamic polarization curves (PI-50-1 potentiostate, scan rate 0.5 mV/sec). The anodic potentials were measured in 3% NaCl solution, which is conventionally used in corrosion tests (sea-water imitation). The potentials in this paper are relative to the standard reference silver-silver chloride electrode.

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