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Ti6Al4V alloy was ion implanted with carbon, nitrogen, platinum, or gold. The effect of heat treatment at 500 ЊC on the depth distributions of oxygen and implanted atoms was investigated using backscattering spectrometry. The phases in the near-surface region were determined using transmission electron microscopy (TEM) and X-ray diffraction (XRD). Platinum and gold are enriched in both ␣-and ␤-titanium solid solutions. Implanted carbon forms titanium carbide at lower concentration than nitrogen forms titanium nitride. The depth profiles of Au, Pt, and N are not altered by annealing. Implanted carbon as well as oxygen diffuse to larger depth upon heat treatment. Noble metal-implanted layers are permeable to oxygen diffusion. At concentrations exceeding 35 at. pct, implanted carbon and nitrogen act as a diffusion barrier for oxygen.