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Thin films of high T~ superconductor YBa2CusO7 _~, were obtained by magnetron sputtering. MgO, YSZ, YSH and A120 s single crystals were used as substrates. Epitaxial films with tetragonal structure having Tc 55-60 K grow at substrate temperatures T, between 930 K and 980 K. Orientation of the films in this T~ range was (100) and (001) for (100) MgO substrate, (111) and (001) for (1012) AlzO 3 and (111) YSH and (113) or (103) on (110t YSZ and (l 11) YSH. Single crystalline films with orthorhombic structure and (001) orientation were grown on all the substrates when T~ exceeded 980 K. They have Tc > 80 K.