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This paper introduces an effective way to build efficient miniature C-band filters using high-permittivity ceramics. The objective was to evaluate the feasibility of such filters using commercial electromagnetic simulators and a conventional fabrication process. For the demonstration, the substrate integrated waveguide (SIW) technology was chosen. Compared with planar solutions, this configuration offers good quality factors and good electrical performances as a consequence. However, its dimensions are large, leading to unacceptably large footprints for many applications. The solution proposed in this paper is based on a ceramic substrate with a permittivity of 90, which allowed us to work with shorter wavelengths. In comparison with a standard alumina substrate (permittivity ε r = 9.9), this approach makes it possible to reduce the footprint up to nine times. Two prototypes were realized on a Trans-Tech ceramic substrate (thickness = 635 μm, ε r = 90, and tanδ = 9 · 10 −4 ). The first prototype is a folded sixth-order SIW filter including a cross coupling combining coplanar waveguide probes and a thin microstrip line on an InterVia substrate. The second one is a folded eighth-order SIW filter without cross couplings. Here, we compare the sixth-order prototype with an identical one built on alumina. The eighth-order filter, which had no alumina counterpart, is a potentially useful alternative for situations where complex technological steps must be avoided.Index Terms-High-K ceramic substrates, microwave filters, substrate integrated waveguide (SIW).

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This paper presents a digitally tunable SIW (substrate integrated waveguide) filter designed for X-band, based on RF-MEMS (radio frequency micro-electrical-mechanical systems) technology. Four commercial off-the-shelf RF-MEMS single-pole single-throw (SPST) switches were directly mounted on the upper surface of the filter, with metallic tuning posts specifically located within each cavity to define the potential achievable frequency range. Fabricated on standard alumina substrate, the design of the filter and the biasing network enabled fine digital frequency control of up to four functional states by the inclusion of wire bondings between each switch and the substrate. A relative tuning range of 2.3% was achieved between the lower and upper discrete states of 2.76% and 2.89% in the 3 dB fractional bandwidths.

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