Herein, the optimization of (In)GaN heterostructures for chemical sensing is presented. The metalorganic vapor phase epitaxy (MOVPE)‐grown sensor consists of an InxGa1−xN quantum well (QW) placed close to the surface of a GaN substrate with a thin GaN cap layer on top. The photoluminescence (PL) wavelength of this QW is sensitive to surface potential changes and thus its optical signal is used as sensor response. Simulations are performed with nextnano to improve its sensitivity. Sensor parameters such as the cap layer thickness d, QW thickness Lz, background buffer layer doping concentration N, and indium concentration x of the QW are varied. It is found that a thin cap layer, together with high background doping and medium QW thickness, is ideal. The indium content does not show a strong influence on sensitivity. The trends found in the simulations are mostly confirmed in real‐world experiments performed in a chemical sensing setup, yet quantitative deviations exist.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.