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This paper concerns deposition of nano and micro structures of Lithium Niobate (LiNbO3) on a quartz substrate using sol–gel method. The nanostructure was deposited based on spin coating technique with speed of 3000[Formula: see text]rpm for 30[Formula: see text]s. Samples were exposed for different annealing temperature ranges from 100∘C to 600∘C. The optical properties and the morphological results of the grown films have been investigated using the scanning electron microscope (SEM), atomic force microscopy (AFM), optical study through UV–Visible and Photoluminescence (PL). The results showed that good transmission and bandgap properties can be obtained as the annealing temperature increases. In contrast, the higher annealing temperature results in reduction of the refractive index value, and the grains are regularly distributed within the film as a result of increasing the annealing temperature. This comes from the growing effect of packs density as a result of oxidation process during heating process.

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