Surface functionalization and bioreceptor immobilization are critical processes in developing a highly sensitive and selective biosensor. The silanization process with 3-aminopropyltriethoxysilane (APTES) on oxide surfaces is frequently used for surface functionalization because of beneficial characteristics such as its bifunctional nature and low cost. Optimizing the deposition process of the APTES layer to obtain a monolayer is crucial to having a stable surface and effectively immobilizing the bioreceptors, which leads to the improved repeatability and sensitivity of the biosensor. This review provides an overview of APTES deposition methods, categorized into the solution-phase and vapor-phase, and a comprehensive summary and guide for creating stable APTES monolayers on oxide surfaces for biosensing applications. A brief explanation of APTES is introduced, and the APTES deposition methods with their pre/post-treatments and characterization results are discussed. Lastly, APTES deposition methods on nanoparticles used for biosensors are briefly described.