For the first time, the TiO 2 nanorod arrays have been prepared on ITO substrates at room temperature by dc reactive magnetron sputtering technique. These TiO 2 nanorods have a preferred orientation along the (220) direction and are perpendicular to the ITO substrate. Both the X-ray diffraction and Raman scattering measurements show that the highly ordered TiO 2 nanorod arrays have an anatase crystal structure. The diameter of the nanorod varies from 30 nm to 100 nm and the nanorod length can be varied from several hundred nanometers to several micrometers depending on the deposition time. The TiO 2 nanorod arrays with about 3 micrometers length have been used as an electrode for dye-sensitized solar cell (DSSC). Short-circuit photocurrent density, opencircuit voltage, fill factor and light-to-electricity conversion efficiency at 100 mW/cm 2 light intensity are estimated to be 12.76 mA/cm 2 , 0.65 V, 0.63 and 5.25%, respectively, for the DSSC made of the TiO 2 nanorods.
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