This work reports the results of spectroscopic ellipsometry study of CdS thin films, deposited on glass substrates in the presence of oxygen at room temperature by rf sputtering. The data acquisition, together with the subsequent linear regression analysis to restore dielectric function has been performed over the photon energy range 1.5–5.0 eV. The obtained oxygen-free CdS films and reference bulk CdS have been found to be very much the same regarding their dielectric function spectra. On the other hand, blue-shift of the main structures in dielectric function has been observed for CdS:O films deposited at 5% value of O/Ar ratio. In spite of the broadening taking place on a par with the shift, the last turns out to be so large that provides transparency of CdS:O thin films in a spectral range above the energy gap of CdS. The obtained results allow to considering CdS:O as an improved window-layer material for solar cell application.
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