The integration of a flexible temperature sensor with a soft microactuator (a pneumatic balloon actuator) for a functional microfinger is presented herein. A sensor integrated with a microactuator can actively approach a target for contact detection when a distance exists from the target or when the target moves. This paper presents a microfinger with temperature sensing functionality. Moreover, thermocouples, which detect temperature based on the Seebeck effect, are designed for use as flexible temperature sensors. Thermocouples are formed by a pair of dissimilar metals or alloys, such as copper and constantan. Thin-film metals or alloys are patterned and integrated in the microfinger. Two typical thermocouples (K-type and T-type) are designed in this study. A 2.0 mm × 2.0 mm sensing area is designed on the microfinger (3.0 mm × 12 mm × 400 μm). Characterization indicates that the output voltage of the sensor is proportional to temperature, as designed. It is important to guarantee the performance of the sensor against actuation effects. Therefore, in addition to the fundamental characterization of the temperature sensors, the effect of bending deformation on the characteristics of the temperature sensors is examined with a repeated bending test consisting of 1000 cycles.

Motion capture of a robot and tactile sensing for a robot require sensors. Strain sensors are used to detect bending deformation of the robot finger and to sense the force from an object. It is important to introduce sensors in effective combination with actuators without affecting the original performance of the robot. We are interested in the improvement of flexible strain sensors integrated into soft microrobot fingers using a pneumatic balloon actuator (PBA). A strain sensor using a microchannel filled with liquid metal was developed for soft PBAs by considering the compatibility of sensors and actuators. Inflatable deformation generated by PBAs, however, was found to affect sensor characteristics. This paper presents structural reinforcement of a liquid metal-based sensor to solve this problem. Parylene C film was deposited into a microchannel to reinforce its structure against the inflatable deformation caused by a PBA. Parylene C deposition into a microchannel suppressed the interference of inflatable deformation. The proposed method enables the effective combination of soft PBAs and a flexible liquid metal strain sensor for use in microrobot fingers.

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