A reactive inverse matrix assisted pulsed laser evaporation method was used for the fabrication of hybrid graphene-based electrodes for supercapacitors.

We present the fabrication, operation, and CMOS integration of arrays of suspended silicon nanowires (SiNWs). The functional structures are obtained by a top-down fabrication approach consisting in a resistless process based on focused ion beam irradiation, causing local gallium implantation and silicon amorphization, plus selective silicon etching by tetramethylammonium hydroxide, and a thermal annealing process in a boron rich atmosphere. The last step enables the electrical functionality of the irradiated material. Doubly clamped silicon beams are fabricated by this method. The electrical readout of their mechanical response can be addressed by a frequency down-mixing detection technique thanks to an enhanced piezoresistive transduction mechanism. Three specific aspects are discussed: (i) the engineering of mechanically coupled SiNWs, by making use of the nanometer scale overhang that it is inherently-generated with this fabrication process, (ii) the statistical distribution of patterned lateral dimensions when fabricating large arrays of identical devices, and (iii) the compatibility of the patterning methodology with CMOS circuits. Our results suggest that the application of this method to the integration of large arrays of suspended SiNWs with CMOS circuitry is interesting in view of applications such as advanced radio frequency band pass filters and ultra-high-sensitivity mass sensors.

The fabrication of bendable electronic devices is being a scientific-technological area of very rapid advance in which new materials and fabrication techniques are being continuously developed. In this kind of devices, the fabrication of flexible conductive electrodes adherent to the substrate is a key factor. Besides, eco-friendliness, low cost and fast production are essential requirements for the successful progress of new technologies.In this work, a novel method for obtaining graphene-based flexible electrodes is presented. Conductive films were obtained by means of visible laser irradiation of graphene oxide layers deposited on polyethylene terephthalate substrates besides selfstanding membranes sandwiched between glass slides. Despite the low power of the laser system, numerical simulations indicate the development of temperatures over 1000 K throughout the irradiated material. The laser-induced spatially confined heating leads to the reduction of the graphene oxide material whereas the glass-based sandwich assembly avoids reoxidation from surrounding air. By scanning and pixelated modes, reduced graphene oxide electrodes, up to 100 µm in thickness, and with resistivity as low as 6×10 -4 Ωm were obtained in an easy and versatile way. Proof-of-concept microsupercapacitors and electrochemical sensors were fabricated with this technique, showing promising performance.