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Polymeric amines generated by UV-induced electron transfer in polymeric quaternized tetraalkylammonium borate salts are found suitable for the thermal cross-linking of epoxides where nucleophilic attack on the epoxy ring is favorable. A cross-linked polymer network insoluble in organic solvent becomes the basis of a negative-tone photoimaging system. Sensitivity and resolution parameters have been evaluated by atomic force microscopy (AFM). Addition of reagents containing hydroxyl moieties to a film containing both the polymeric amine precursor and epoxide improves sensitivity more than 3-fold manifesting chemical amplification due to the catalytic nature of the cross-linking process.

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New polymeric materials based on N,N,N-trialkyl-N-(p-benzoylbenzyl)ammonium triphenylbutylborate have been synthesized and characterized. Model compounds provide spectroscopic evidence that these polymers are capable of forming free tertiary amines upon irradiation at 365 nm. Photochemical generation of base is much enhanced when triphenylbutylborate is used as the electron donor. Using this concept, the synthesized polymers have been utilized for imaging in a single-component system. Positive-tone images can be achieved by washing the polymeric film produced upon exposure to light with aqueous acidic solution and ethanol.

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