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The goal of this research is to introduce the design and simulation of a novel 2×2 SOI integrated photonic phased array switch. Under-etched NEMS-operated slot waveguides are used as the active phase shifters offering the benefits of compact size and low power consumption. The design of the NEMS-operated phase shifter has been validated by numerical analysis and simulation. The finite difference mode three-dimensional full-vectorial solver of FIMMPROP is used for the simulation. The designed NEMS-operated phase shift element is only 349 µm in length, exhibits an excess loss of about 1.1 dB and provides a phase shift of 180º. Straight transition slot waveguide couplers with high efficiency of about 96.7% have been designed to couple the NEMS-operated phase shifters to standard unslotted waveguides. The 2×2 MMI (multimode interference) couplers used in the switch element feature a compact size of 4 µm × 61.2 µm, have a small excess loss of about 0.155 dB and minimal imbalance of about -0.004 dB. The NEMS-operated phase shifters are located on the sides of the switch with their outermost electrode bond pads. Optical interferogram response is utilized for the testing of the designed phase shifters.

We present the design of novel 2 × 2 and 4 × 4 photonic phased array switch elements with the capability to actively tune wavelength division multiplexing pass-bands. The switch elements use nano-electromechanical systems phase shifters located on the two longitudinal sides of the structures; offering advantages of compact footprint and low-power consumption. The design is verified using the complex finite difference mode three-dimensional full-vectorial solver of the simulation tool FIMMPROP and utilizing custom numerical analysis.

Copper oxides are one of the metal oxides , that has been studied for several reasons such as the nature and their reasonably good electrical and optical properties by Cu2O Copper formed two known oxides : cupric (CuO) and curprous (Cu2O) were p-type with a band gap energy 1.21 to 1.51 eV and 2.1 to 2.6 eV respectively [1-3]. On the other hand CuO with different nanoshape has been synthesized by different methods in many research papers [4-10]

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